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Effects of two-step deposition and thermal treatment on the frequency response characteristics of ZnO SAW devices

Authors :
Jin-Bock Lee
Jin-Seok Park
Hye-Jung Lee
Source :
IEEE International Frequency Control Sympposium and PDA Exhibition Jointly with the 17th European Frequency and Time Forum, 2003. Proceedings of the 2003.
Publication Year :
2004
Publisher :
IEEE, 2004.

Abstract

Polycrystalline ZnO thin films are deposited on SiO/sub 2//Si(100) substrate using RF magnetron sputtering. The film deposition performed in this research is composed of the following two procedures; 1/sup st/-deposition for 30 min without oxygen at 100 W and 2/sup nd/-deposition with oxygen in the range O/sub 2//(Ar+O/sub 2/)=10/spl sim/50%. Deposited ZnO films reveal a strongly c-axis preferred-orientation (the corresponding texture coefficient /spl sim/100%) as well as a high resistivity (>10/sup 7//spl Omega/cm). It is also observed that the crystallite size of ZnO is noticeably increased by thermal-annealing. In addition, surface acoustic wave (SAW) devices are also fabricated by using a lift-off method, with the configuration of IDT/ZnO/SiO/sub 2//Si(100). Frequency response characteristics (including S/sub 21/) of fabricated SAW devices are measured and device parameters including insertion losses and side-lobe rejection level estimated from frequency response are compared.

Details

Database :
OpenAIRE
Journal :
IEEE International Frequency Control Sympposium and PDA Exhibition Jointly with the 17th European Frequency and Time Forum, 2003. Proceedings of the 2003
Accession number :
edsair.doi...........3165806825678d60395a3e3c91fb32f4
Full Text :
https://doi.org/10.1109/freq.2003.1275204