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Stress Development during the Reactive Formation of Silicide Films

Authors :
François M. d'Heurle
Patrice Gergaud
Olivier Thomas
Christian Rivero
Source :
Defect and Diffusion Forum. :801-812
Publication Year :
2005
Publisher :
Trans Tech Publications, Ltd., 2005.

Details

ISSN :
16629507
Database :
OpenAIRE
Journal :
Defect and Diffusion Forum
Accession number :
edsair.doi...........31600df2d1c0fa0c8acac58507879e83