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DC and RF Breakdown in Microscale Gaps From Near Vacuum to Atmospheric Pressures
- Source :
- 2022 IEEE International Conference on Plasma Science (ICOPS).
- Publication Year :
- 2022
- Publisher :
- IEEE, 2022.
Details
- Database :
- OpenAIRE
- Journal :
- 2022 IEEE International Conference on Plasma Science (ICOPS)
- Accession number :
- edsair.doi...........31227a43995b94777f2dfb487a65c6cf
- Full Text :
- https://doi.org/10.1109/icops45751.2022.9813250