Back to Search
Start Over
Damascene Gate CMOSFETs with 30 nm-Scale Gate Length
- Source :
- Extended Abstracts of the 2004 International Conference on Solid State Devices and Materials.
- Publication Year :
- 2004
- Publisher :
- The Japan Society of Applied Physics, 2004.
Details
- Database :
- OpenAIRE
- Journal :
- Extended Abstracts of the 2004 International Conference on Solid State Devices and Materials
- Accession number :
- edsair.doi...........309b04cb1f9d84c62c0da186b4f0e510
- Full Text :
- https://doi.org/10.7567/ssdm.2004.p2-15