DUV high power lasers processing for glass and CFRP

A laser processing is widely applied to cutting, drilling, welding, bending and surface treatment in industry. Lasers with a wavelength of 1 μm are mainly used and the processing is realized by melting materials. This thermal process has a high productivity but the processed surface is hard to use for precision machining. This report is focusing on two materials which are classified in wide band gap. Ablation rate was measured with a laser microscope and an optical one. Excimer laser is expected to be a useful tool for these materials