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Chemical Beam Etching With Monolayer Control
- Source :
- Proceedings of IEE/LEOS Summer Topical Meetings: Integrated Optoelectronics.
- Publication Year :
- 2005
- Publisher :
- IEEE, 2005.
Details
- Database :
- OpenAIRE
- Journal :
- Proceedings of IEE/LEOS Summer Topical Meetings: Integrated Optoelectronics
- Accession number :
- edsair.doi...........304ac1708a123a0df01af0d8dca05739
- Full Text :
- https://doi.org/10.1109/leosst.1994.700538