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Chemical Beam Etching With Monolayer Control

Authors :
W.T. Tsang
R.M. Kapre
T. H. Chiu
M.D. Williams
J.F. Ferguson
Source :
Proceedings of IEE/LEOS Summer Topical Meetings: Integrated Optoelectronics.
Publication Year :
2005
Publisher :
IEEE, 2005.

Details

Database :
OpenAIRE
Journal :
Proceedings of IEE/LEOS Summer Topical Meetings: Integrated Optoelectronics
Accession number :
edsair.doi...........304ac1708a123a0df01af0d8dca05739
Full Text :
https://doi.org/10.1109/leosst.1994.700538