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Effects of Thermal Annealing on the Structural, Electrical and Mechanical Properties of Al-Doped ZnO Thin Films Deposited by Radio-Frequency Magnetron Sputtering
- Source :
- Science of Advanced Materials. 5:7-13
- Publication Year :
- 2013
- Publisher :
- American Scientific Publishers, 2013.
Details
- ISSN :
- 19472935
- Volume :
- 5
- Database :
- OpenAIRE
- Journal :
- Science of Advanced Materials
- Accession number :
- edsair.doi...........2f9afb5a3e766fb07b5e9e1615b54bac
- Full Text :
- https://doi.org/10.1166/sam.2013.1424