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Calculation of removal function of ion beam figuring and polishing experiment

Authors :
邓伟杰 Deng Wei-jie
唐瓦 Tang Wa
郑立功 Zheng Li-gong
张学军 Zhang Xue-jun
Source :
Optics and Precision Engineering. 23:31-39
Publication Year :
2015
Publisher :
Changchun Institute of Optics, Fine Mechanics and Physics, Chinese Academy of Sciences, 2015.

Subjects

Subjects :
Figuring
Optics
Materials science
Ion beam
business.industry
Polishing
Function (mathematics)
business
Atomic and Molecular Physics, and Optics
Electronic, Optical and Magnetic Materials

Details

ISSN :
1004924X
Volume :
23
Database :
OpenAIRE
Journal :
Optics and Precision Engineering
Accession number :
edsair.doi...........2ef4f3c16531d8dd142975b62df4c514

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