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Evaluation of Temperature at SiC Surface During Pulsed Excimer Laser Irradiation
- Source :
- 2021 9th International Japan-Africa Conference on Electronics, Communications, and Computations (JAC-ECC).
- Publication Year :
- 2021
- Publisher :
- IEEE, 2021.
Details
- Database :
- OpenAIRE
- Journal :
- 2021 9th International Japan-Africa Conference on Electronics, Communications, and Computations (JAC-ECC)
- Accession number :
- edsair.doi...........2ed439a6f723d669b5c9bcd4974e1b53
- Full Text :
- https://doi.org/10.1109/jac-ecc54461.2021.9691436