Scaling wafer stresses and thermal processes to large wafers

MLA

Robert H. Nilson, and Stewart K. Griffiths. “Scaling Wafer Stresses and Thermal Processes to Large Wafers.” Thin Solid Films, vol. 315, Mar. 1998, pp. 286–93. EBSCOhost, widgets.ebscohost.com/prod/customlink/proxify/proxify.php?count=1&encode=0&proxy=&find_1=&replace_1=&target=https://search.ebscohost.com/login.aspx?direct=true&site=eds-live&scope=site&db=edsair&AN=edsair.doi...........2ea70ffed1fe2a60495cb8c3c7dae142&authtype=sso&custid=ns315887.

APA

Robert H. Nilson, & Stewart K. Griffiths. (1998). Scaling wafer stresses and thermal processes to large wafers. Thin Solid Films, 315, 286–293.

Chicago

Robert H. Nilson, and Stewart K. Griffiths. 1998. “Scaling Wafer Stresses and Thermal Processes to Large Wafers.” Thin Solid Films 315 (March): 286–93. http://widgets.ebscohost.com/prod/customlink/proxify/proxify.php?count=1&encode=0&proxy=&find_1=&replace_1=&target=https://search.ebscohost.com/login.aspx?direct=true&site=eds-live&scope=site&db=edsair&AN=edsair.doi...........2ea70ffed1fe2a60495cb8c3c7dae142&authtype=sso&custid=ns315887.