Transparent Y[sub 2]O[sub 2]S:Eu[sup 3+] phosphor thin films grown by reactive evaporation and their luminescent properties

Transparent Y 2 O 2 S:Eu 3+ phosphor thin films have been grown by a reactive evaporation method. Y metal vaporized by electron-beam irradiation was allowed to react with SO 2 gas molecules. Eu was simultaneously supplied from a resistively heated crucible containing EuCl 3 powder. By employing a heated W filament and an ac plasma cell to excite (crack) the SO 2 molecules, Y 2 O 2 S:Eu 3+ thin films and thin films containing both Y 2 O 3 and Y 2 O 2 S phases which showed intense red photoluminescence were obtained. These results suggest that the films obtained are crystallized and Eu 3+ ions substitute for Y ions in the Y 2 O 3 and Y 2 O 2 S lattices and hence form luminescent centers.