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Development of in situ, at-wavelength metrology for soft X-ray nano-focusing
- Source :
- Nuclear Instruments and Methods in Physics Research Section A: Accelerators, Spectrometers, Detectors and Associated Equipment. 649:160-162
- Publication Year :
- 2011
- Publisher :
- Elsevier BV, 2011.
-
Abstract
- At the Advanced Light Source (ALS), we are developing broadly applicable, high-accuracy, in situ, at-wavelength wavefront slope measurement techniques for Kirkpatrick-Baez (KB) mirror nano-focusing. We describe here details of the metrology beamline endstation, the at-wavelength tests, and an original alignment method that have already allowed us to precisely set a bendable KB mirror to achieve a FWHM focused spot size of ~;;120 nm, at 1-nm soft x-ray wavelength.
Details
- ISSN :
- 01689002
- Volume :
- 649
- Database :
- OpenAIRE
- Journal :
- Nuclear Instruments and Methods in Physics Research Section A: Accelerators, Spectrometers, Detectors and Associated Equipment
- Accession number :
- edsair.doi...........2e35dcb67e609df7fd7bd9ffbb85edd3
- Full Text :
- https://doi.org/10.1016/j.nima.2010.10.134