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Power MEMS and microengines

Authors :
Ian A. Waitz
G. Gauba
Reza Ghodssi
E. S. Piekos
Kenneth S. Breuer
F. F. Ehrich
G. Anathasuresh
Stephen D. Senturia
Alan H. Epstein
G. Shirley
Y. S. Tzeng
Chuan Seng Tan
C. Groshenry
Steven F. Nagle
Stuart A. Jacobson
S.M. Spearing
C.-C. Mehra
Jeffrey H. Lang
J. O.Mur Miranda
D. J. Orr
Kuo-Shen Chen
Martin A. Schmidt
Arturo A. Ayon
Source :
Proceedings of International Solid State Sensors and Actuators Conference (Transducers '97).
Publication Year :
2002
Publisher :
IEEE, 2002.

Abstract

MIT is developing a MEMS-based gas turbine generator. Based on high speed rotating machinery, this 1 cm diameter by 3 mm thick SiC heat engine is designed to produce 10-20 W of electric power while consuming 10 grams/hr of H/sub 2/. Later versions may produce up to 100 W using hydrocarbon fuels. The combustor is now operating and an 80 W micro-turbine has been fabricated and is being tested. This engine can be considered the first of a new class of MEMS device, power MEMS, which are heat engines operating at power densities similar to those of the best large scale devices made today.

Details

Database :
OpenAIRE
Journal :
Proceedings of International Solid State Sensors and Actuators Conference (Transducers '97)
Accession number :
edsair.doi...........2d3e8412444ee30e99ebcd28091f2225
Full Text :
https://doi.org/10.1109/sensor.1997.635209