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Graphene piezoresistive flexible MEMS force sensor for bi-axial micromanipulation applications

Authors :
Monica Lamba
Himanshu Chaudhary
Kulwant Singh
Premraj Keshyep
Vibhor Kumar
Source :
Microsystem Technologies. 28:1687-1699
Publication Year :
2022
Publisher :
Springer Science and Business Media LLC, 2022.

Subjects

Subjects :
Hardware and Architecture
Electrical and Electronic Engineering
Condensed Matter Physics
Electronic, Optical and Magnetic Materials

Details

ISSN :
14321858 and 09467076
Volume :
28
Database :
OpenAIRE
Journal :
Microsystem Technologies
Accession number :
edsair.doi...........2d15e0a77381cc5f7a2887de8d33c795
Full Text :
https://doi.org/10.1007/s00542-022-05312-w
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