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Emissive Probe for Diagnostics of Reactive Vacuum Arc Plasma

Authors :
Hirofumi Takikawa
Tateki Sakakibara
Hironobu Matsuo
Source :
IEEJ Transactions on Fundamentals and Materials. 111:1025-1026
Publication Year :
1991
Publisher :
Institute of Electrical Engineers of Japan (IEE Japan), 1991.

Subjects

Subjects :
Materials science
business.industry
Optoelectronics
Vacuum arc
Plasma
Electrical and Electronic Engineering
business

Details

ISSN :
13475533 and 03854205
Volume :
111
Database :
OpenAIRE
Journal :
IEEJ Transactions on Fundamentals and Materials
Accession number :
edsair.doi...........2cc99aac0c48fd6c759232646abb9dfb
Full Text :
https://doi.org/10.1541/ieejfms1990.111.11_1025
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