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Adsorption Behaviors of Chlorosilanes, HCl, and H2 on the Si(100) Surface: A First-Principles Study
- Source :
- ACS Omega. 7:42105-42114
- Publication Year :
- 2022
- Publisher :
- American Chemical Society (ACS), 2022.
- Subjects :
- General Chemical Engineering
General Chemistry
Subjects
Details
- ISSN :
- 24701343
- Volume :
- 7
- Database :
- OpenAIRE
- Journal :
- ACS Omega
- Accession number :
- edsair.doi...........2cb0f50a0a4d62af7c1a00d79dbd4962
- Full Text :
- https://doi.org/10.1021/acsomega.2c04502