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Metal Interconnect Process Control Using Picosecond Ultrasonics

Authors :
Alain C. Diebold
Robert Stoner
Source :
Handbook of Silicon Semiconductor Metrology ISBN: 9780429207655
Publication Year :
2001
Publisher :
CRC Press, 2001.

Subjects

Subjects :
Materials science
business.industry
Electronic engineering
Picosecond ultrasonics
Optoelectronics
Process control
Metal interconnect
business

Details

ISBN :
978-0-429-20765-5
ISBNs :
9780429207655
Database :
OpenAIRE
Journal :
Handbook of Silicon Semiconductor Metrology ISBN: 9780429207655
Accession number :
edsair.doi...........2c714669acf3feeead647a0beec101ce

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Authors Abstract Subjects Details