Applications of image diagnostics to metrology quality assurance and process control

MLA

Robert D. Larrabee, et al. “Applications of Image Diagnostics to Metrology Quality Assurance and Process Control.” SPIE Proceedings, July 2003. EBSCOhost, https://doi.org/10.1117/12.504320.

APA

Robert D. Larrabee, John A. Allgair, Daniel C. Cole, Jerry Dan Hutcheson, Joseph C. Pellegrini, Benjamin Bunday, Oliver C. Wells, Sylvain Muckenhirn, Alexander Starikov, Alain C. Diebold, James E. Potzick, Neal T. Sullivan, Nigel P. Smith, András E. Vladár, Andrew W. Gurnell, Mark P. Davidson, Victor V. Boksha, John M. McIntosh, & David C. Joy. (2003). Applications of image diagnostics to metrology quality assurance and process control. SPIE Proceedings. https://doi.org/10.1117/12.504320

Chicago

Robert D. Larrabee, John A. Allgair, Daniel C. Cole, Jerry Dan Hutcheson, Joseph C. Pellegrini, Benjamin Bunday, Oliver C. Wells, et al. 2003. “Applications of Image Diagnostics to Metrology Quality Assurance and Process Control.” SPIE Proceedings, July. doi:10.1117/12.504320.