Work function uniformity of Al–Ni alloys obtained by scanning Maxwell-stress microscopy as an effective tool for evaluating metal transistor gates

MLA

Hiromi Yamauchi, et al. “Work Function Uniformity of Al–Ni Alloys Obtained by Scanning Maxwell-Stress Microscopy as an Effective Tool for Evaluating Metal Transistor Gates.” Applied Physics Letters, vol. 86, Feb. 2005, p. 094104. EBSCOhost, widgets.ebscohost.com/prod/customlink/proxify/proxify.php?count=1&encode=0&proxy=&find_1=&replace_1=&target=https://search.ebscohost.com/login.aspx?direct=true&site=eds-live&scope=site&db=edsair&AN=edsair.doi...........2beaa2feebc10e721da38bcf62a2273c&authtype=sso&custid=ns315887.

APA

Hiromi Yamauchi, Chiaki Yasumuro, Seigo Kanemaru, Meishoku Masahara, Takashi Matsukawa, & Eiichi Suzuki. (2005). Work function uniformity of Al–Ni alloys obtained by scanning Maxwell-stress microscopy as an effective tool for evaluating metal transistor gates. Applied Physics Letters, 86, 094104.

Chicago

Hiromi Yamauchi, Chiaki Yasumuro, Seigo Kanemaru, Meishoku Masahara, Takashi Matsukawa, and Eiichi Suzuki. 2005. “Work Function Uniformity of Al–Ni Alloys Obtained by Scanning Maxwell-Stress Microscopy as an Effective Tool for Evaluating Metal Transistor Gates.” Applied Physics Letters 86 (February): 094104. http://widgets.ebscohost.com/prod/customlink/proxify/proxify.php?count=1&encode=0&proxy=&find_1=&replace_1=&target=https://search.ebscohost.com/login.aspx?direct=true&site=eds-live&scope=site&db=edsair&AN=edsair.doi...........2beaa2feebc10e721da38bcf62a2273c&authtype=sso&custid=ns315887.