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Porous Si/SnO2 nanowires heterostructures for H2S gas sensing
- Source :
- Ceramics International. 46:604-611
- Publication Year :
- 2020
- Publisher :
- Elsevier BV, 2020.
-
Abstract
- In this work, a low-temperature (100 °C) gas sensor based on heterojunctions of porous Si and SnO2 nanowires (NWs) is presented. Porous Si was obtained from p-Si wafers by electrochemical etching, and SnO2 NWs were fabricated by a vapor-liquid-solid route. Different characterization techniques were used to verify the formation of porous Si/SnO2 NW heterojunctions. H2S gas sensing results showed enhanced gas sensing performance of the porous Si/SnO2 NW sensor in comparison with that of a porous Si sensor. The reasons for such enhancement are discussed in detail. This study demonstrates the promising effects of SnO2 NWs in combination with porous Si to realize low-temperature H2S gas sensors that are highly compatible with existing Si processing technology.
- Subjects :
- 010302 applied physics
Materials science
business.industry
Process Chemistry and Technology
Nanowire
Heterojunction
02 engineering and technology
021001 nanoscience & nanotechnology
01 natural sciences
Surfaces, Coatings and Films
Electronic, Optical and Magnetic Materials
Characterization (materials science)
0103 physical sciences
Materials Chemistry
Ceramics and Composites
Optoelectronics
Wafer
Electrochemical etching
0210 nano-technology
Porosity
business
Subjects
Details
- ISSN :
- 02728842
- Volume :
- 46
- Database :
- OpenAIRE
- Journal :
- Ceramics International
- Accession number :
- edsair.doi...........2bd3c614bf0c77061578493e863dfc05
- Full Text :
- https://doi.org/10.1016/j.ceramint.2019.09.010