MBE-grown 1.3 micron InGaAsN/GaAs double QW VCSELs with very low-threshold current density under room temperature CW operation

MBE growth of high quality diluted Nitride materials have been investigated. Photoluminescence intensity of high nitrogen content InGaAsN/GaAs SQW can be improved significantly by decreasing the growth temperature due to suppressd phase separation of InGaAsN alloy. The longest room temperature PL peak wavelength obtained in this study is 1.59 μm by increasing the nitrogen composition up to 5.3%. High performance ridge-waveguide InGaAsN/GaAs single quantum well lasers at wavelength 1.3 μm have been demonstrated. Threshold current density of 0.57 KA/cm 2 was achieved for the lasers with a 3-μm ridge width and a 2-mm cavity length. Slope efficiencies of 0.67 W/A was obtained with 1 mm cavity length. The cw kink-free output power of wavelength 1.3 μm single lateral mode laser is more than 200 mW, and the maximum total wallplug efficiency of 29% was obtained. Furthermore, monolithic MBE-grown vertical cavity surface emitting lasers (VCSELs) on GaAs substrate with an active region based on InGaAsN/GaAs double quantum wells emitting at 1304 nm with record threshold current density below 2 KA/cm 2 also have been demonstrated. The CW output power exceeds 1 mW with an initial slope efficiency of 0.15 W/A. Such low threshold current density indicates the high quality of InGaAsN/GaAs QW active region.