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High-Performance P-Type Germanium Tri-Gate FETs via Green Nanosecond Laser Crystallization and Counter Doping for Monolithic 3-D ICs

Authors :
Hao-Tung Chung
Yu-Ming Pan
Nein-Chih Lin
Bo-Jheng Shih
Chih-Chao Yang
Chang-Hong Shen
Huang-Chung Cheng
Kuan-Neng Chen
Source :
IEEE Journal of the Electron Devices Society. 11:262-268
Publication Year :
2023
Publisher :
Institute of Electrical and Electronics Engineers (IEEE), 2023.

Details

ISSN :
21686734
Volume :
11
Database :
OpenAIRE
Journal :
IEEE Journal of the Electron Devices Society
Accession number :
edsair.doi...........2b7d6631067d28749567c95716e69772
Full Text :
https://doi.org/10.1109/jeds.2023.3270634