Use of lasers in microtechnology of high-temperature superconducting thin films

Laser ablation of a target and subsequent deposition of films is a widespread method of high temperature superconducting (HTSC) thin films fabrication. High intensity of laser light acting on the target ensures the provides high concentration of excited atoms and ions, that allows the reduction of the temperature needed for the epitaxial growth. High density of the evaporated materials stream near the substrate gives the possibility of fabricating very thin and unbroken films. All this features of laser assisted materials deposition allow the preparation of the epitaxial HTSC thin films of very high quality. In this article we briefly report the results of the conservation of stoichiometry in the deposited films. High temperature of evaporated materials in the laser plume application of lasers for HTSC films creation, their testing and structuring obtained in Moscow State University.© (1992) COPYRIGHT SPIE--The International Society for Optical Engineering. Downloading of the abstract is permitted for personal use only.