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A test pattern for three-dimensional latch-up analysis

Authors :
Roberto Menozzi
M. Davoli
Fausto Fantini
I. De Munari
Source :
ICMTS 93 Proceedings of the 1993 International Conference on Microelectronic Test Structures.
Publication Year :
2002
Publisher :
IEEE, 2002.

Abstract

By means of both cross-section and layout two-dimensional (2D) numerical simulations, three-dimensional (3D) latch-up interactions are demonstrated to significantly influence the latch-up behavior of a typical CMOS structure. A 3D latch-up test pattern is designed to allow the experimental study of such effects. The first measurement results show complex behaviors that can be overlooked if common 2D test patterns are used. >

Details

Database :
OpenAIRE
Journal :
ICMTS 93 Proceedings of the 1993 International Conference on Microelectronic Test Structures
Accession number :
edsair.doi...........2b1fb6dbc3d15f26b09cf525b719677e
Full Text :
https://doi.org/10.1109/icmts.1993.292886