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A test pattern for three-dimensional latch-up analysis
- Source :
- ICMTS 93 Proceedings of the 1993 International Conference on Microelectronic Test Structures.
- Publication Year :
- 2002
- Publisher :
- IEEE, 2002.
-
Abstract
- By means of both cross-section and layout two-dimensional (2D) numerical simulations, three-dimensional (3D) latch-up interactions are demonstrated to significantly influence the latch-up behavior of a typical CMOS structure. A 3D latch-up test pattern is designed to allow the experimental study of such effects. The first measurement results show complex behaviors that can be overlooked if common 2D test patterns are used. >
Details
- Database :
- OpenAIRE
- Journal :
- ICMTS 93 Proceedings of the 1993 International Conference on Microelectronic Test Structures
- Accession number :
- edsair.doi...........2b1fb6dbc3d15f26b09cf525b719677e
- Full Text :
- https://doi.org/10.1109/icmts.1993.292886