Monte Carlo simulation study of the effects of nonequilibrium chemical reactions during pulsed laser desorption

Monte Carlo simulation is used to study the role of chemical reactions in the gas flow of particles laser desorbed from the target into a vacuum. The influence of recombination and dissociation processes on the properties of the gas flow is considered. It was found that chemical reactions have a significant effect on the composition of the desorption jet and on the angular and mean energy distributions of the desorbed particles. The study of these phenomena is of a particular interest for the understanding of the process of thin film deposition by pulsed laser ablation.