Analytical Study and Thermal Compensation for Capacitive MEMS Accelerometer With Anti-Spring Structure

MLA

Xueyong Wei, et al. “Analytical Study and Thermal Compensation for Capacitive MEMS Accelerometer With Anti-Spring Structure.” Journal of Microelectromechanical Systems, vol. 29, Oct. 2020, pp. 1389–400. EBSCOhost, https://doi.org/10.1109/jmems.2020.3011949.

APA

Xueyong Wei, Edmond Cretu, Yang Gao, & Hongcai Zhang. (2020). Analytical Study and Thermal Compensation for Capacitive MEMS Accelerometer With Anti-Spring Structure. Journal of Microelectromechanical Systems, 29, 1389–1400. https://doi.org/10.1109/jmems.2020.3011949

Chicago

Xueyong Wei, Edmond Cretu, Yang Gao, and Hongcai Zhang. 2020. “Analytical Study and Thermal Compensation for Capacitive MEMS Accelerometer With Anti-Spring Structure.” Journal of Microelectromechanical Systems 29 (October): 1389–1400. doi:10.1109/jmems.2020.3011949.