Calculating the Resistance Inductance Parameter of the Interconnection with High Order Basis Function Method

In this paper, the high order basis function method is used to calculate the resistance inductance parameter of the interconnection, which uses the global basis function. The advantage is that the number of the basis functions is fixed, and when analyzing any dimension wire, the dimension of the resistive inductance matrix is constant in the part of calculating each wire, which is not affected by the reduction of computational efficiency resulted from excessive matrix elements. This paper also gives the elements analytic expression of part of resistance and inductance matrix, increasing the computational efficiency significantly. Compared with the experimental measurement data, the method has high precision and meets the requirements.