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Evidence for segregation of Te in Ge2Sb2Te5 films: Effect on the 'phase-change' stress

Authors :
Lia Krusin-Elbaum
Matthew Copel
Steve Rossnagel
Vaughn R. Deline
Kuan-Neng Chen
Cyril Cabral
Kathleen B. Reuter
David W. Abraham
John Bruley
Source :
Applied Physics Letters. 90:141902
Publication Year :
2007
Publisher :
AIP Publishing, 2007.

Abstract

The authors present direct evidence for Te segregation to the grain boundaries in chalcogenide Ge2Sb2Te5 films by using transmission electron microscopy scans with a 0.5nm diameter focused probe. This finding is consistent with the observed impeded grain growth and with the post-transition relief of a “spikelike” stress, fully to the pretransition level. Te motion shows up in void formation below 200°C, a pileup of Te at the surface and its loss at higher (above 400°C) temperatures. Tuning the driving force for this segregation may be key for the optimal phase-change material design.

Details

ISSN :
10773118 and 00036951
Volume :
90
Database :
OpenAIRE
Journal :
Applied Physics Letters
Accession number :
edsair.doi...........2985149c71fe6828c87bbfbc70b01b67
Full Text :
https://doi.org/10.1063/1.2719148