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High-SPL and Low-Driving-Voltage pMUTs by Sputtered Potassium Sodium Niobate

Authors :
Fan Xia
Yande Peng
Sedat Pala
Ryuichi Arakawa
Wei Yue
Pei-Chi Tsao
Chun-Ming Chen
Hanxiao Liu
Megan Teng
Jong Ha Park
Liwei Lin
Source :
2023 IEEE 36th International Conference on Micro Electro Mechanical Systems (MEMS).
Publication Year :
2023
Publisher :
IEEE, 2023.

Details

Database :
OpenAIRE
Journal :
2023 IEEE 36th International Conference on Micro Electro Mechanical Systems (MEMS)
Accession number :
edsair.doi...........28e0b0ce9ddeabe16a1fa07baa3a83de

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