28-2: Distinguished Paper : Toward Sub-micron Oxide Thin-Film Transistors for Digital Holography

We fabricated high performance 2-µm-channel oxide thin-film transistors (TFT) on glass substrate for 7-μm-pixel-pitch spatial light modulator (SLM) panel for digital holographic applications. Furthermore, we succeeded in the demonstration of the sub-micron TFTs, which is an inevitable route to the next-generation spatial light modulation devices with near 1-μm pixel pitch.