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804 In-Plain Thermal Conductivity of Silicon Thin Film
- Source :
- The Proceedings of Conference of Kyushu Branch. :283-284
- Publication Year :
- 2010
- Publisher :
- Japan Society of Mechanical Engineers, 2010.
Details
- ISSN :
- 24242780
- Database :
- OpenAIRE
- Journal :
- The Proceedings of Conference of Kyushu Branch
- Accession number :
- edsair.doi...........286e4b01ab61b87379d4fbf9cca13dd4
- Full Text :
- https://doi.org/10.1299/jsmekyushu.2010.63.283