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Group-V atoms exchange due to exposure of InP surface to AsH/sub 3/(+PH/sub 3/) measured by X-ray CTR scattering

Authors :
N. Yamada
K. Fujibayashi
T. Kumamoto
M. Tabuchi
Y. Takeda
I. Takahashi
J. Harada
Source :
Seventh International Conference on Indium Phosphide and Related Materials.
Publication Year :
2002
Publisher :
IEEE, 2002.

Details

Database :
OpenAIRE
Journal :
Seventh International Conference on Indium Phosphide and Related Materials
Accession number :
edsair.doi...........282b643703ee5da634f9d5d75f865619
Full Text :
https://doi.org/10.1109/iciprm.1995.522121