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Submicron Displacement Measurement Method Based on Fabry-Perot Etalon

Authors :
沈小燕 Shen Xiao-yan
孙志鹏 Sun Zhi-peng
朱鹤年 Zhu Henian
蓝旭辉 Lan Xuhui
禹静 Yu Jing
Source :
Chinese Journal of Lasers. 46:1204002
Publication Year :
2019
Publisher :
Shanghai Institute of Optics and Fine Mechanics, 2019.

Subjects

Subjects :
Measurement method
Materials science
Optics
business.industry
Displacement (orthopedic surgery)
Electrical and Electronic Engineering
business
Atomic and Molecular Physics, and Optics
Fabry–Pérot interferometer
Electronic, Optical and Magnetic Materials

Details

ISSN :
02587025
Volume :
46
Database :
OpenAIRE
Journal :
Chinese Journal of Lasers
Accession number :
edsair.doi...........27ebc09c73a9e9dd4389bb3b78505c0c

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