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MEMS AIRFOIL WITH INTEGRATED INCHWORM MOTOR AND FORCE SENSOR

Authors :
Joseph T. Greenspun
E. Liu
Daniel S. Contreras
Brian G. Kilberg
Hani C. Gomez
Kristofer S. J. Pister
Source :
2018 Solid-State, Actuators, and Microsystems Workshop Technical Digest.
Publication Year :
2018
Publisher :
Transducer Research Foundation, 2018.

Subjects

Subjects :
Microelectromechanical systems
Airfoil
Computer science
Mechanical engineering
Inchworm motor
Force sensor

Details

Database :
OpenAIRE
Journal :
2018 Solid-State, Actuators, and Microsystems Workshop Technical Digest
Accession number :
edsair.doi...........27d89de4497e1609d31f0af3eec9a999
Full Text :
https://doi.org/10.31438/trf.hh2018.87
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