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High frequency microfluidic performance of LiNbO3 and ZnO surface acoustic wave devices

Authors :
Yuanjun Guo
Xiaotao Zu
Yong Qing Fu
Yifan Li
Xingli He
Jian Zhou
Anthony J. Walton
Jikui Luo
Hongzhen Lv
Source :
Journal of Applied Physics. 116:024501
Publication Year :
2014
Publisher :
AIP Publishing, 2014.

Abstract

Rayleigh surface acoustic wave (SAW) devices based on 128° YX LiNbO3 and ZnO/Si substrates with different resonant frequencies from ∼62 MHz to ∼275 MHz were fabricated and characterized. Effects of SAW frequency and power on microfluidic performance (including streaming, pumping, and jetting) were investigated. SAW excitation frequency influenced the SAW attenuation length and hence the acoustic energy absorbed by the liquid. At higher frequencies (e.g., above 100 MHz), the SAW dissipated into liquid decays more rapidly with much shorter decay lengths. Increasing the radio frequency (RF) frequencies of the devices resulted in an increased power threshold for streaming, pumping, and especially jetting, which is attributed to an increased absorption rate of acoustic wave energy. ZnO SAW devices could achieve similar streaming, pumping, and jetting effects as well as frequency effect, although the SAW signals are relatively weaker.

Details

ISSN :
10897550 and 00218979
Volume :
116
Database :
OpenAIRE
Journal :
Journal of Applied Physics
Accession number :
edsair.doi...........276dfca0ae99337d5b2f06e2592e7449
Full Text :
https://doi.org/10.1063/1.4885038