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Patterning of metal electrode on flexible substrate using laser transfer method

Authors :
Jin-Long Liao
Jing-Yi Yan
Sung-Ho Liu
Yu-Hsuan Lin
Kun-Tso Chen
Jeng Rong Ho
Source :
Conference on Lasers and Electro-Optics 2010.
Publication Year :
2010
Publisher :
OSA, 2010.

Abstract

Through incorporating with the technique of rapid polydimethysiloxane (PDMS) lift-off, this study reports on a new laser transfer method that is applicable to printing metallic thin film on a flexible substrate. Aluminum line patterns, with line widths of 40 and 100 µm and deposited on poly(ethylene terephthalate) (PET) substrate, are presented. The patterned film is demonstrated to be a good conductor, with resistivity of 2.95×10−6 Ω-cm, and with very good adhesion strength through the scotch-tape test.

Details

Database :
OpenAIRE
Journal :
Conference on Lasers and Electro-Optics 2010
Accession number :
edsair.doi...........26cbcb01ed302f9611a4e41914fc10d5
Full Text :
https://doi.org/10.1364/cleo.2010.jtua6