In situ x-ray studies of the incipient ZnO atomic layer deposition on In0.53Ga0.47As

Authors :: L. Pithan
Elisabeth Blanquet
Hubert Renevier
Jean-Luc Deschanvres
Evgeniy V. Skopin
G. Ciatto
Marie-Ingrid Richard
Dillon D. Fong
Laetitia Rapenne
Source :: Physical Review Materials. 4
Publication Year :: 2020
Publisher :: American Physical Society (APS), 2020.

Subjects :: 010302 applied physics
In situ
Atomic layer deposition
Materials science
Physics and Astronomy (miscellaneous)
0103 physical sciences
X-ray
Analytical chemistry
General Materials Science
02 engineering and technology
021001 nanoscience & nanotechnology
0210 nano-technology
01 natural sciences

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