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In-situ quality monitoring during the deposition of a-Si:H films

Authors :
Christian Haffer
Marinus Kunst
Carsten Swiatkowski
Günter Seidelmann
Publication Year :
1993
Publisher :
Elsevier, 1993.

Details

Database :
OpenAIRE
Accession number :
edsair.doi...........265c356cf21ff137f964d2580b4fd5f1

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