Characterization of Post Etch Residues Depending on Resist Removal Processes after Aluminum Etch

MLA

Maria Heidenblut, et al. “Characterization of Post Etch Residues Depending on Resist Removal Processes after Aluminum Etch.” Solid State Phenomena, Jan. 2009, pp. 349–52. EBSCOhost, https://doi.org/10.4028/www.scientific.net/ssp.145-146.349.

APA

Maria Heidenblut, D. Sturm, Alfred Lechner, & Franz Faupel. (2009). Characterization of Post Etch Residues Depending on Resist Removal Processes after Aluminum Etch. Solid State Phenomena, 349–352. https://doi.org/10.4028/www.scientific.net/ssp.145-146.349

Chicago

Maria Heidenblut, D. Sturm, Alfred Lechner, and Franz Faupel. 2009. “Characterization of Post Etch Residues Depending on Resist Removal Processes after Aluminum Etch.” Solid State Phenomena, January, 349–52. doi:10.4028/www.scientific.net/ssp.145-146.349.