Semiconducting YBaCuO thin films for uncooled infrared bolometers

We have fabricated and measured the performance of semiconducting YBaCuO thin‐film thermometers on silicon for uncooled bolometric applications. Our YBaCuO thermometers have revealed a change in resistance with respect to temperature (dR/dT) as high as 8.2×103 Ω/K at T=294 K and the temperature coefficient of resistance as high as 3.1% K−1 over a 60 K range around room temperature which implies an excellent bolometric response. At 294 K the thermometers had a noise voltage of 0.75 μV/Hz1/2 at the frequency of 30 Hz and the bias current of 1 μA. Using the data above, we calculated that semiconducting YBaCuO bolometers would have a responsivity of 5.5×104 V/W and a detectivity D* as high as 1.3×108 cm Hz1/2/W for 1 μA bias current if integrated with a typical thermal isolation structure.