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Preparation of aluminium doped Ta3N5 films via nitridation of sputtered tantalum oxide films
- Source :
- Materials Chemistry and Physics. 287:126110
- Publication Year :
- 2022
- Publisher :
- Elsevier BV, 2022.
- Subjects :
- General Materials Science
Condensed Matter Physics
Subjects
Details
- ISSN :
- 02540584
- Volume :
- 287
- Database :
- OpenAIRE
- Journal :
- Materials Chemistry and Physics
- Accession number :
- edsair.doi...........25dd0ed98e6b0253b8dcdf537ec5c10b
- Full Text :
- https://doi.org/10.1016/j.matchemphys.2022.126110