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Performance of interferometric rotation encoders using diffraction gratings

Authors :
Ulrich Benner
Guy Voirin
Pierre Sixt
Francis S. M. Clube
Olivier Parriaux
S. M.O.L. Schneider
Yves Darbellay
Source :
SPIE Proceedings.
Publication Year :
1997
Publisher :
SPIE, 1997.

Abstract

High resolution optical encoders take advantage of diffraction and interference properties of light. In such components, the scale is a phase grating that diffracts light into several orders; an optical reading system makes two of them to interfere. In state of the art systems, the orders interfere after they have been spatially separated from other orders; this leads to cumbersome reading heads. A compact, fully diffractive optical reading system was designed and realized. This reading system was used for the realization of rotation encoders. Using the competences of the Eureka EU 922 FOTA project partners, the encoder phase gratings were successfully realized and the reading system was implemented in standard rotation encoder housings. Without interpolation the encoder gives 480'000 pulses per revolution with a repeatability of 2.5 pulses.

Details

ISSN :
0277786X
Database :
OpenAIRE
Journal :
SPIE Proceedings
Accession number :
edsair.doi...........25d6f6e5846a26c4ccfb23283731755e
Full Text :
https://doi.org/10.1117/12.281223