Investigation on immersion defectivity root cause

MLA

Scott Warrick, et al. “Investigation on Immersion Defectivity Root Cause.” 23rd European Mask and Lithography Conference, Feb. 2007. EBSCOhost, https://doi.org/10.1117/12.736328.

APA

Scott Warrick, K. Mestadi, David Cruau, S. Gaugiran, Michael Benndorf, Vincent Farys, Romain Feilleux, & C. Sourd. (2007). Investigation on immersion defectivity root cause. 23rd European Mask and Lithography Conference. https://doi.org/10.1117/12.736328

Chicago

Scott Warrick, K. Mestadi, David Cruau, S. Gaugiran, Michael Benndorf, Vincent Farys, Romain Feilleux, and C. Sourd. 2007. “Investigation on Immersion Defectivity Root Cause.” 23rd European Mask and Lithography Conference, February. doi:10.1117/12.736328.