A Study of Beam Sensitive Materials Using High Resolution, ULV Scanning Electron Microscopy

Authors :: Mitsugu Sato
Mine Nakagawa
Shuichi Takeuchi
Atsushi Muto
T Ogashiwa
Sara T. White
Source :: Microscopy and Microanalysis. 11
Publication Year :: 2005
Publisher :: Oxford University Press (OUP), 2005.

Subjects :: Conventional transmission electron microscope
Scanning probe microscopy
Materials science
business.industry
Scanning confocal electron microscopy
Scanning ion-conductance microscopy
Energy filtered transmission electron microscopy
Optoelectronics
Scanning capacitance microscopy
Electron beam-induced deposition
business
Instrumentation
Vibrational analysis with scanning probe microscopy

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