A micro-machined flow sensor formed on copper on a polyimide substrate and its application to respiration measurement

Authors :: Mitsuhiro Shikida
Yoshihiro Hasegawa
Kazuhiro Taniguchi
Ayami Kato
Miyoko Matsushima
Tsutomu Kawabe
Source :: Japanese Journal of Applied Physics. 58:SDDL07
Publication Year :: 2019
Publisher :: IOP Publishing, 2019.

Subjects :: Materials science
Physics and Astronomy (miscellaneous)
chemistry
Respiration
General Engineering
General Physics and Astronomy
chemistry.chemical_element
Flow sensor
Composite material
Polyimide substrate
Copper

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