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Characterization of initial one monolayer growth of Ge on Si(1 0 0) and Si on Ge(1 0 0)
- Source :
- Applied Surface Science. :1-5
- Publication Year :
- 2001
- Publisher :
- Elsevier BV, 2001.
-
Abstract
- One-monolayer deposition characteristics have been investigated for Ge on the Si(1 0 0) surface and Si on the Ge(1 0 0) surface by using a co-axial impact collision ion scattering spectroscopy. A subtracted spectrum method has been proposed for the detailed analysis of the interface structure. Incident angle dependence of the signal intensity shows that both Ge/Si and Si/Ge hetero-interfaces are atomically abrupt without intermixing and surface segregation.
- Subjects :
- Materials science
Silicon
Scattering
Superlattice
General Physics and Astronomy
chemistry.chemical_element
Germanium
Heterojunction
Surfaces and Interfaces
General Chemistry
Condensed Matter Physics
Molecular physics
Surfaces, Coatings and Films
Crystallography
chemistry
Monolayer
Atomic layer epitaxy
Spectroscopy
Subjects
Details
- ISSN :
- 01694332
- Database :
- OpenAIRE
- Journal :
- Applied Surface Science
- Accession number :
- edsair.doi...........2494c24a14f0cc0241cb86a83e4b0d7e