Sub-10 nm High-Aspect-Ratio Patterning of ZnO Using an Electron Beam

Authors :: Mark E. Welland
Dae Joon Kang
Wilhelm T. S. Huck
K.R.V. Subramanian
Dustin Anderson
Mohammad S. M. Saifullah
Geraint Jones
Source :: Advanced Materials. 17:1757-1761
Publication Year :: 2005
Publisher :: Wiley, 2005.

Subjects :: Materials science
chemistry
Mechanics of Materials
Mechanical Engineering
Cathode ray
chemistry.chemical_element
General Materials Science
Nanotechnology
Zinc
Electron beam-induced deposition
Electron-beam lithography
Next-generation lithography

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