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Determining the Causes of Scanning Distortions in SEM and FIB

Authors :
J. Katcki
Marcin Juchniewicz
Marek Wzorek
Andrzej Czerwiński
Mariusz Płuska
Source :
Microscopy and Microanalysis. 21:1703-1704
Publication Year :
2015
Publisher :
Oxford University Press (OUP), 2015.

Subjects

Subjects :
Materials science
Instrumentation

Details

ISSN :
14358115 and 14319276
Volume :
21
Database :
OpenAIRE
Journal :
Microscopy and Microanalysis
Accession number :
edsair.doi...........2336dcfb32d94c235836201121e84c9e

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