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Dependence of Dissolution Rate on Processing and Molecular Parameters of Resists
- Source :
- ACS Symposium Series ISBN: 9780841208230, Polymers in Electronics
- Publication Year :
- 1984
- Publisher :
- American Chemical Society, 1984.
- Subjects :
- Materials science
Resist
Chemical engineering
Dissolution
Subjects
Details
- ISBN :
- 978-0-8412-0823-0
- ISBNs :
- 9780841208230
- Database :
- OpenAIRE
- Journal :
- ACS Symposium Series ISBN: 9780841208230, Polymers in Electronics
- Accession number :
- edsair.doi...........22c9a08ff3af4a7a9c72cf2e73b17981
- Full Text :
- https://doi.org/10.1021/bk-1984-0242.ch007