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Structure and Electrical Properties of Polysilicon Films Doped with Ammonium Tetraborate Tetrahydrate
- Publication Year :
- 2023
- Publisher :
- Elsevier BV, 2023.
Details
- Database :
- OpenAIRE
- Accession number :
- edsair.doi...........21e6d60c6c3baf7f839ee92d5cf6c0aa
- Full Text :
- https://doi.org/10.2139/ssrn.4446896